レーザー研究
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
X 線タイコグラフィによるX 線吸収微細構造のナノスケール計測
広瀬 真高橋 幸生
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ジャーナル フリー

2020 年 48 巻 8 号 p. 414-

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抄録
Ptychography is an emerging scanning lensless microscopy that can simultaneously visualize both the object function and the illumination field from multiple coherent diffraction patterns. In the X-ray region, the fabrication accuracy of the lens is already approaching its technical limitation, and hence, ptychography is regarded as a promising technique for the high-spatial-resolution imaging of bulk materials. A combination of X-ray ptychography and X-ray absorption spectroscopy, called X-ray spectro-ptychography, can also provide information on the chemical state and/or the atomic arrangement at the nanoscale by reconstructing the spatially-resolved X-ray Absorption Fine Structure (XAFS) spectra. However, the measurement of nanoscale XAFS is challenging due to its small absorption cross section, especially in the hard X-ray region. Here, we introduce the basic principle of X-ray ptychography and report the recent progress on the development and the application of hard X-ray spectro-ptychography.
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