Abstract
Argon fluoride (ArF) excimer laser is a typical deep ultraviolet (DUV) light source which can generate
above 100-W average power with several tens of nanoseconds pulse duration. Using all-solid-state
sub-nanosecond DUV light source as a master oscillator and amplifying by ArF excimer (hybrid ArF laser),
both high average power and single transverse mode can be realized. The short pulse hybrid ArF
laser generates a burst pulse with individual pulse width of 460 ps. We found that the burst pulse can
suppress cracks in non-alkali glass during laser drilling. Multi-hole drilling on non-alkali glass was
demonstrated using a diffractive optical element (DOE) at 193 nm. We also demonstrated a laser drilling
on 2-mm thick ceramic matrix composite (CMC). Diagonal through holes at the slanted angles of 30°
and 20° were created on SiC-CMC.
