The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Laser Review
Deep Ultraviolet Laser Development and Its Application for Processing
Yohei KOBAYASHIToshio OTSUShuntaro TANI
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2024 Volume 52 Issue 1 Pages 27-

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Abstract
We have developed some deep ultraviolet laser systems by using fiber lasers and solid-state lasers. These laser systems have been used for laser processing and other scientific applications such as photoemission spectroscopy. Some deep ultraviolet laser systems and their applications are discussed here.
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© 2024 by The Laser Society of Japan
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