Preface to Special Issue on Recent Advances in Development of High-Power Short-Wavelength Light Sources and Their Application Technology

Abstract

There are intense research activities in developing high-power short-wavelength light sources and their application to various fields. This paper describes the overview of the special issue on “recent advances in high-power short-wavelength light sources and their application technology.” The topic of the issue covers the development of deep ultraviolet (DUV) laser diodes, generation of DUV, vacuum ultraviolet (VUV), and extreme ultraviolet (EUV) light by high-order harmonic generation and wave-mixing, and their application, such as laser processing, photoemission spectroscopy, EUV mask inspection, and virus inactivation.