Efficient Discharge-Pumped Excimer Lasers

Abstract

The typical operating characteristics of a compact capacitor-transfer-type discharge-pumped excimer laser are experimentally studied to improve the laser efficiency.The highest overall emciencies recorded with Xe Cl, Kr F and Ar F lasers were 2.9%, 2.8% and 1.3%, respectively, which have been achieved by operating at relatively low charging voltages for high-pressure gas mixtures. The efficient Xe Cl laser cocld generate an average power of 16 W with an average efficiency of 2.1% at a repetition rate of 80 Hz.