Fabrication of Thin-Film Warm-Carrier Infrared Laser Detectors

Abstract

The thin-film warm carrier device which has a 0.1μm-diam pinhole electric contact was fabricated by electron beam lithographic method associated with ion-beams.
The detected properties for CO₂ laser radiation were measured. A very clear antenna pattern was obtained for an electric field polarized in the plane of incidence, although the detected voltage was small compared with that of point contact warm carrier device.