レーザー研究
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
薄膜ウォームキャリア赤外レーザー光検出素子の試作
原川 健一, 安岡 義純, 蒲生 健次, 難波 進
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ジャーナル フリー

1985 年 13 巻 3 号 p. 284-291

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抄録
The thin-film warm carrier device which has a 0.1μm-diam pinhole electric contact was fabricated by electron beam lithographic method associated with ion-beams.
The detected properties for CO2 laser radiation were measured. A very clear antenna pattern was obtained for an electric field polarized in the plane of incidence, although the detected voltage was small compared with that of point contact warm carrier device.
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