芳香族炭化水素のエキシマレーザー光分解による炭素膜形成

抄録

Deposition of hydrogenated carbon films by photodissociation of aromatic hydrocarbons using Ar F or Kr F excimer laser beam directed parallel to a substrate has been demonstrated. Infrared absorption spectrum and transmission election diffraction pattern show that the films mainly contain diamond like structure and partially contain graphite like structure. Optical bandgap of the films calculated by using ultraviolet spectrum sows that the hydrogen content of the films is different when the laser wavelength, the materials or the substrate temperature is different.