抄録
A method for detecting a shift of Young's fringes is applied to a high precision measurement of a displacement of a piezoelectric transducer (PZT). An arctangent calculation with Fourier cosine and sine integrals of the fringe profile gives the phase of Young's fringes, which is proportional to the displacement of the PZT. The method of the phase detection is described with theoretical error estimations. Experimental results of the PZT displacement using a non-polarizating Michelson interferometer are presented with estimations of the measurement accuracy and the minimum detectable phase change.
