抄録
This paper reviews recent progress in the micro-machining using Nd: YAG lasers. The merits and features of Nd: YAG lasers for materials micro-machining are briefly presented. The state of the arts of various kinds of micro-machining, such as scanning-spot marking, interconnections direct-writing, electronic components spot welding, and flat-packaged IC soldering are described. Nd: YAG lasers are ideal light sources since they can emit light pulses covering wide ranges in the output power and pulse duration, thus enabling us to use various mechanisms for micromachining.
