Abstract
Laser induced fluorescence (LIF) spectroscopy has been applied to the diagnostics of plasmasused for thin-film preparation from hydrocarbon gases. From the absolute density and the spatialdistribution of CH radicals in a methane RF discharge plasma, their flux onto the substrate and contributionto the deposition were estimated. C2 and OH radicals produced in an C2H2/O2 flame werealso measured. A characteristic flame structure calld “feather”, in which carbon-containing radicalssuch as C2 exist in a fairly large amount, is typically seen under the deposition condition of diamondfilm.
