Abstract
Multilayers can be used as dispersion elements ndfocusing mirrors for soft x-ray. We develop new reflective optical elements utilizing themultilayer . Flat and curved large area multilayers are fabricated using our newly developed magnetron sputtering method. The multilayers are uniform in layer period within about ±1%. The reflectivity of the multilayers agrees well with theoretical calculations. The focusing properties of the curved multilayers are in agreement with ray-tracing calculations. An excellent reflectivity of 46% at l3nm wavelength is obtained. This reflectivity is sufficient for use as the focusing mirror for soft x-ray.
