Abstract
The 0-1 band selection of a XeC1 excimer laser was performed by using a solid etalon, with the aid of the OH absorption in the 0-2 band. Owing to the spectral width of the 0-1 band reduced to 13 pm and to the effectively reduced energy of the 0-2 band, brightness was increased by a factor of 13. The band selected output energy density, 11.0 mJ/cm2, is in good agreement with the value, 11.1 mJ/cm2, predicted from a simple model.