Abstract
A high-power ultra-short pulse excimer laser is being developed in the Max-Planck Institut für biophysikalische Chemie Göttingen, Fed. Rep. Germany. This system consists of an excimer laser excited distributed feedback dye laser and large aperture KrF excimer amplifiers. A subterawatt femtosecond KrF excimer laser (150fs, 45mJ) system has been working reliably. AnX-ray preionized 100mm×100mm large aperture KrF excimer amplifier has been constracted successfully, by which the output power level of the system will be extended to the terawatt region.
