Development of Corona-preionized TEA-CO2 Laser with HFCD Circuit Recycling Residual Energy

抄録

In a corona-preionized TEA-CO2 laser, high-frequency corona discharge (HFCD) was superposed on the main discharge by utilizing a new circuit called as SC-HFCD (Self-Charged HFCD) circuit. In the SC-HFCD circuit, a part of residual electric energy, which is usually lost by heating of resistive components in a discharge circuit, is recycled as an electrical source for the HFCD in the next laser operation. Therefore it is possible to increase the total efficiency because the energy for the HFCD is saved. The maximum laser output energy of 17.5J/l was obtained with the SC-HFCD circuit at an input energy density of 250J/l, while an arc-free condition was maintained for input energy densities up to 230J/l. The performance of the SC-HFCD circuit was also explained theoretically.