エキシマレーザー注入堆積法によるステンレス鋼の表面改質
1991 年 19 巻 3 号 p. 220-229
詳細
1991 年 19 巻 3 号 p. 220-229
Various aspects of the metal surface modified by the photochemical reaction induced by an excimer laser are reviewed. The doping and deposition of Si occurs simultaneously by irradiating stainless steel 304 placed in a SiH4 or Si2H6 gas atmosphere with KrF excimer laser. Since Si atoms distribute continuously from the substrate regions to the deposited films, the Si films have very high adhesion strength. The specific process for surface modification is referred to as laser implant-deposition (LID). By the LID process, surface coloring of the stainless steel 304 is realized, and also surface handness and resistance to corrosion in acid solutions are greatly improved.
