エキシマレーザー蒸着法による高温超電導薄膜

抄録

We prepared superconducting oxide thin films with high critical temperatures and high critic-al current densities by excimer laser evaporation. The optical spectroscopic study of the plume shows the existence of oxide species such as YO, BaO and CuO, instead of metal species, at 30mm from the target surface. Furthermore, we investigated the origin of small particles char-acteristically revealed on the surface of the films and found that they seem to be propelled from the target, but not generated on the film, because of their round shape and their existence even in the early stages of film growth.