レーザー研究
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
CO2レーザーブレークダウンによる微粒子の生成 (III) Mo (CO)6からのMo及びMoS2微粒子の生成
大山 俊之石井 忠浩武内 一夫
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1994 年 22 巻 1 号 p. 2-8

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Fine powdered Mo and MoS2 were synthesized in vapor phase reactions by a TEA-CO2laser-induced breakdown technique. Molybdenum particles were prepared from Mo (CO)6; molybdenum sulfide particles were prepared from a mixture of Mo (CO)6 and CS2. The particulatem aterials were characterized by scanning electron microscopy, ICP ctomic emission spectroscopy, and X-ray diffraction. The particles are monodispersed, neafly sphedcal, and 0.05-0.4μm indiameter. An X-ray diffraction study indicates that the Mo particle is crystalline and MoS2particle is amorphous. The yield of the Mo particle increased linearly with increasing laser pulseenergy.
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