Design of Beam Homogenizer for Material Processing and Its Applications

Abstract

A design of a beam homogenizer which consists of kaleidoscope and lens optics is described. The beam intensity uniformity of ±8% and the pattern edge sharpness of 0.1mm were obtained with the excimer laser beam homogenizer constructed with the low spherical aberration (<10μm) imaging lens and the kaleidoscope carefully designed with a beam uniformity simulation code.