Optical System with High-Efficiency for Excimer Laser Ablation Apparatus

Abstract

In order to improve the capabilities of the exicimer laser ablation apparatus thatuses an imaging optical system, we have been developing an innovative multiple irradiation optical system, which utilizes laser energy more efficiently than a conventional optical system. In our system, a reflector is placed opposite the mask, and the mask surface is made of a highly reflective coating. In this optical system, a laser beam irradiates the mask repeatedly, and the laser energy is used more efficently than in the conventional optical system. Experimental results show that, in comparison with the conventional optical system, our system is 12 times energy efficient.