Abstract
A demand for non-contact measurements in processes is increasing, especially for threedimensionalmeasuerment. The three-dimensional measurement device based on laser trigonometryusing a scanning parallel beam has been developed. The device is capable of measuringthe shape of an object at high speeds, because the output voltage is proportional to themeasured shape. A measurement device with two cylindrical lenses as a focusing lens has alsobeen made. It is suitable for measurement of the shape of a wide and thin object like a plate. The measurement error is found to be below ±40 μm.
