抄録
Deposition of a diamond-like carbon (DLC) film on glass substrates in atmosphere atambient temperature using the laser physical vapor deposition (PVD) method has been investigated. The output from Nd-YAG laser is focused on a highly purified graphite carbontarget. The effect of the laser beam is to eject the ablation plume and to ensure only carbonions. By placing a glass substrate within the ablation plume created by irradiating a carbontarget with a Nd-YAG laser.
The following conclusions were obtained: (1) The laser beam is aimed vertically in relationto the target and the substrate is set parallel to the target. Then substarte should be used thetransparent material with laser beam. (2) The quality of DLC film is improved by using a relativelylong pulse width laser (msec order). (3) The optimal setting distance of substrate fromthe target to obtain the higher quality DLC film is typically 20 mm.
