Normal Incidence Multilayer Mirrors for Soft X-Rays

抄録

We review first the state of the art fabrication techniques for normal incidence multilayer mirrors, and then discuss the problems such as columnar structure, thermal stability, mechanical stress, focusing properties of multilayer mirrors, film thickness distribution, and finally the applications of multilayer mirrors for the x-ray lasers and x-ray projection lithography, using mainly the data experimentally obtained.