A Method for the Measurement of Optical Beam Induced Current Using Scanning Laser Microscope

Abstract

OBIC (Optical Beam Induced Current) microscope is an application of a scanning laser microscope. It enables to visualize a photo conductivity and/or depletion region of p-n junction in a semiconductor material. This paper briefly reviews the principle of photo current measurement, instrumentation, and some applications. Moreover, spectroscopic OBIC image has been investigated with the specially designed OBIC microscope which can switch the excitation wavelength.