抄録
We developed an all solid state exciter composed of a semiconductor switch with MAGTs (MOS Assisted Gate-triggered Thyristors) and a single-stage MPC (Magnetic Pulse Compression circuit) for high repetition rate XeCl excimer laser. Thirty two (32) MAGTs connected in series were used as the semiconductor switch for a 25kV-900A-0.6μs pulse generation. For MPC, cobalt-based amorphous alloy treated by annealing was selected as core materials for the purpose of reducing magnetic losses.
The continuous operation with an average laser power of 43W at 3kHz was verified with this exciter. The efficiency of the switch of 75% was obtained at 3kHz operation. The experimental results verify that replacing thyratrons with the all solid state exciter is possible.
