The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Fabrication of Copper-Phthalocyanine Thin Films by Laser Ablation Deposition
Naotaka MATSUMOTOEigorou INATakeo FUJIIFumihiko KANNARI
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1996 Volume 24 Issue 9 Pages 978-986

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Abstract
Copper-phthalocyanine (CuPc) thin films were successfully fabricated via pulsed laser ablation. In order to maintain a molecule architechture in the deposited films, laser fluence must be kept near the laser ablation threshold. Despite of poor crystallinity exhibited in the films, the CuPc film still maintains its electrical property and works as a hole-transport layer in a double-layer electroluminescence cell emitting -500nm light. The crystallinity of CuPc thin films was improved by heating a substrate at -320K during the deposition or by irradiating the film surface with He-Ne laser at room temperature.
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© The Laser Society of Japan
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