多層膜コートグレーティングの最前線

抄録

Multilayer coated gratings have been developed in order to increase the diffraction efficiency without astigmatism which is available for smaller optical systems at (near) normal incidence in soft x-ray and EUV region. This technique has been studied firstly in the field of the astronomy, and the efficiency of the multilayer coated gratings have been improved to be much higher than that of the conventional gratings with monolayer metal film coating. Recently there are many studies to improve the diffraction efficiency and to solve the technical problems such as the roughness of the grating facets.