We have developed a wave front correction system for use in vacuum and high temperature environments. The sensor is a Shack-Hartman type composed of afocal system and 10×14 micro lens array designed athermaly, and a commercial CCD camera. The measurement error of the wave front was less than 1/10λ rms in atemperature range from 20°C to 60°C in a vacuum environment. The deformable mirror is composed of an 84×84 mm mirror, 5×5 PZT actuators, and hinges connected by a bonds designed for use in high temperatureand vacuum environments. The wave front acurracy was 1/10λ rms in the region of ±5λ and the 3rd ordermode in a vaccum of -1.3×10-4 Pa and a temperature of range from 26°C to 60°C. The control band of the system was 1 Hz. The characteristics of this system were measured and evaluated by using a 200 W level dyelaser beam of 35×50 mm, and wave front warps of about 4λ p-v were corrected to 0.1λ p-v within a time of 1 sec.
