抄録
A computer simulation code for UV-periodized discharge Kr F lasers is developed, including time dependent circuit equations and kinetic rate equations for various atomic and molecular species, electrons and photons. The energy distribution of electrons are calculated with a Boltzmann code. The laser characteristics computed by this code are compared with those of a home-made Kr F laser, and the energy loss mechanism is investigated for the variation of the input voltage, the total gas pressure, and the size of the active medium. The results are qualitatively in good agreement with those of experiment except the absolute output energy. This disagreement is maybe caused by the non-uniform distribution of the discharge. The most important loss effective to the over-all efficiency is the circuit loss by impedance mis-matching. The scalability of these self-sustained discharge excimer lasers is briefly discussed with this simulation code.
