抄録
We have developed a new type of SIMS (IMA-2AS) which incorporates total ion monitor, secondary ion energy analyzer and turbo molecular pumps. We propose a new method for adjusting the trajectory of secondary ion beam in the mass spectrometer. That is the combination method of total ion monitoring and secondary ion energy analysis.
By this method, we measured secondary ion intensities of Cr, Si and C in sieel. From the experimental results, it has been proved that the C.V.% of secondary ion intensities were reduced to about 20~50%. So, we could define the effect of experimental conditions and changes in Cr content of samples to the secondary ion intensities.
