SIMS Analysis of Borosilicate Glasses using Sensitivity Factor Calculation

Abstract

Secondary ion mass spectrometry has been used for the analysis of a series of commercial optical glasses of borosilicate system. Quantitative reductions of secondary ions from the glasses having different degrees of surface charge build-up were made by a calculation method involving sensitivity factors derived from glasses selected arbitrarily as reference materials from the series. The matrix effect was negligible in the glasses used and the sensitivity factor calculation gave results within a factor of 1.2 of theoretical expectations when mass peaks obtained were strong enough to quantify.