Journal of the Mass Spectrometry Society of Japan
Online ISSN : 1880-4225
Print ISSN : 1340-8097
ISSN-L : 1340-8097
報文
A Compact Primary Gun for Molecular SIMS
Itsuo KatakuseToshio IchiharaHiromitsu NakabushiTakekiyo MatsuoHisashi Matsuda
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ジャーナル フリー

1983 年 31 巻 2 号 p. 111-114

詳細
抄録
A compact primary gun of cold cathode discharge type for molecular SIMS is described. The size of the gun is 15 mm diameter and 31 mm long and 5 - 10 μA primary ion current was obtained. It could be mounted to a conventional FD source without any machine work of vaccum chamber.
Some SIMS spectra obtained with the gun up to m/z = 7000 are shown.
著者関連情報
© 1983 by The Mass Spectrometry Society of Japan
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