水素イオンビームを用いたイオンマイクロアナリシスの評価

抄録

The deuteron beam was applied as a primary ion to the ion microprobe mass spectrometry. The beam focus and the detection sensitivities of secondary ions for elements were examined, regarding 21 keV D₃⁺ ion beam. The results were compared with those of similar experiments by 20 keV O₂⁺.
The current density was very high, and beam focus was extremely good; in the current density range from 0.1 to 0.5 A/cm² the D-ion beam could be focussed to 0.5 μm. The secondary ion sensitivities under D₃⁺ bombardment were low. But, for noble metals such as Au and Ag the sensitivities were comparably high. Making use of the merit of its high current density, it can be promising to use the deuteron beam as a primary ion for the ion microprobe mass spectrometry. Moreover, very low sputtering yield and good focus could enable us to do the three dimensional analysis with high precision.
The problems in the use of deuteron beam as a primary ion are formation of blistering or flaking and of rough surface under the deuteron bombardment. The surface swelling and the surface compositional change as well, for Si and for compounds such as TiC respectively, should be considered.