Simulation of Positive Secondary-Ion Emission from Ar⁺-(or O₂⁺-) Bombarded Fe-Based Alloys by Local Thermodynamic Equilibrium Model

抄録

Low-alloy and stainless steels of known composition were Ar⁺-(or O₂⁺-) bombarded, and the secondary ion currents were converted to elemental concentrations with a help of the Saha-Eggert equation. When the secondary ions are emitted from the surface layer which contains as many oxygen atoms as possible, the calculated concentrations were sufficiently close to the specified values for most constituent elements. This indicates that the secondary ion emission from the surface layer of steels can be simulated by the local thermodynamic equilibrium model when the layer contains many oxygen atoms.