Abstract
Analytical characteristics of inductively coupled plasma mass spectrometry (ICP-MS) and its application to the metal and ceramic analyses are described. After referring to the ICP structure, the optimization of operating parameters and some kinds of interferences are discussed. Several characteristics of 27.12 and 40.68 MHz Ar-ICPs are compared, and a nitrogen and an oxygen ICP using a 40.68 MHz generator are evaluated as an ion source for MS. Application of ICP-MS for the determination of trace elements in several kinds of metal and ceramic samples are summerized, where chemical preparation techniques are required for the sample decomposition and the preconcentration of analytical elements. Laser ablation techniques are also applied to the solid sample analyses without chemical preparation.
