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Volume 45 (1997)
- Issue 6 Pages 619-
- Issue 5 Pages 539-
- Issue 4 Pages 493-
- Issue 3 Pages 237-
- Issue 2 Pages 125-
- Issue 1 Pages 1-
Volume 45, Issue 2
Displaying 1-6 of 6 articles from this issue
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REVIEWS
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Akihiro WAKISAKA, Kenji KOGA, Harutoshi TAKEO1997 Volume 45 Issue 2 Pages 125-136
Published: 1997
Released on J-STAGE: July 20, 2007
JOURNAL FREE ACCESSClusters, ensemble of atoms and/or molecules with less number enough to form stable bulk, are thought to play important roles in various phenomena such as, crystallization, phase separation, chemical reactions, etc. Several techniques to produce clusters have been developed and studies in this field are becoming active. Two new methods to produce clusters and the investigations on their characteristics are described in this paper. One is the characteristics of clusters formed from liquid (solution), and the other is the formation and the stabilization of clusters on the surface and their structural investigation.View full abstractDownload PDF (781K) -
Sakae TANEMURA, Junichi MURAKAMI, Yutaka TAI, Masahiro GOTO, Kazuo IGA ...1997 Volume 45 Issue 2 Pages 137-157
Published: 1997
Released on J-STAGE: July 20, 2007
JOURNAL FREE ACCESSRecently we have sucessfully developed, 1) the apparatus to select a size of clusters, which is generated by laser ablation and innert gas aggregation techniques, by a TOF mass spectrometer with an ion reflector and a mass gate, 2) the machine to generate mass selected cluster flux with high density by CORDIS (Cold Reflex Discharge Ion Source), gas filled multi cooling stages consisted of Q-pole, and mass selection filters by means of Q-mass spectrometer, and 3) the apparatus to generate highly densed ionized cluster flux by Ar discharged magnetron sputtering gun operated under about 1,000 Pa He as an aggregation gas, to study deposition of cluster flux with and/or without a kinetic energy onto substrate for a fabrication of a complex quantum confined nano structure on any substrate by using clusters as building blocks.
In this paper, the main characteristics of above three apparatuses and some of the recent preliminary experimental results are summarized. And the prospects of this new attempt are discussed after reviewing the latest progresses of computer simulation on “soft landing” and “hard collision” by cluster impacts onto a crystal substrate by our colaborative laboratory.View full abstractDownload PDF (1577K) -
Kazuyoshi SUSHIDA1997 Volume 45 Issue 2 Pages 159-174
Published: 1997
Released on J-STAGE: July 20, 2007
JOURNAL FREE ACCESSOver the past decade, inductively coupled plasma mass spectrometry (ICP-MS) has been regarded to be one of the most powerful techniques for ultra-trace elemental analysis. This technique offers excellent analytical characteristics, (1) simplicity of spectra compared with ICP-AES, (2) extremely low detection limits (pg/ml) for most elements, (3) a broad linear dynamic range, (4) rapid multi-element determination, (5) isotope ratio and isotope dilution method capability, and (6) rapid qualitative analysis for ultra-trace metal impurities. However, even the most modern ICP-MS instruments still suffer from a number of spectral and non-spectral interferences. In order to avoid isobaric overlaps, manufacturers adopted two different concepts. One is a combination of shield-torch and chamber-gas flow for a quadrupole type MS and the other is the usage of a double-focusing high resolution (HR) mass spectrometer. Nowadays, there are ten manufacturers of ICP-MS all over the world.
In this paper, the history of development of ICP-MS is briefly reviewed at first. Applications of ICP-MS to ultra-trace elemental analysis of semiconductor materials (from water to Si wafer) are then documented, focusing the present conditions and meaning of ICP-MS analysis in this industrial field. The increase of memory capacity in the integrated circuit demands the cleanliness as high as possible for each production process. The analytical techniques of (HR-)ICP-MS including ETV is becoming an essential technology to improve their productivity.View full abstractDownload PDF (1145K) -
Hiroshi UCHIDA, Kiyoshi IWASAKI1997 Volume 45 Issue 2 Pages 175-185
Published: 1997
Released on J-STAGE: July 20, 2007
JOURNAL FREE ACCESSAnalytical characteristics of inductively coupled plasma mass spectrometry (ICP-MS) and its application to the metal and ceramic analyses are described. After referring to the ICP structure, the optimization of operating parameters and some kinds of interferences are discussed. Several characteristics of 27.12 and 40.68 MHz Ar-ICPs are compared, and a nitrogen and an oxygen ICP using a 40.68 MHz generator are evaluated as an ion source for MS. Application of ICP-MS for the determination of trace elements in several kinds of metal and ceramic samples are summerized, where chemical preparation techniques are required for the sample decomposition and the preconcentration of analytical elements. Laser ablation techniques are also applied to the solid sample analyses without chemical preparation.View full abstractDownload PDF (707K) -
Kazuyoshi TSUKAMOTO, Hiromi MORITA, Fumiyo TOUJOU, Sumikazu YOSHIKAWA, ...1997 Volume 45 Issue 2 Pages 187-199
Published: 1997
Released on J-STAGE: July 20, 2007
JOURNAL FREE ACCESSCurrent problems and applications of SIMS analysis for electronic materials, especially for semiconductors are discussed from the viewpoint of in-depth profile, micro area and trace analysis and quantification. Static-SIMS and SNMS which are presently being developed as new analytical techniques are also reviewed and those applications for semiconductor materials are shown.View full abstractDownload PDF (802K) -
Tatsuya KAWADA1997 Volume 45 Issue 2 Pages 201-217
Published: 1997
Released on J-STAGE: July 20, 2007
JOURNAL FREE ACCESSOne of the most interesting features of secondary ion mass spectrometry (SIMS) is its ability to detect isotope ratio in a small area of a solid state sample. It enables to study isotope diffusion properties in solids. Experimental setup and data analysis for isotope exchange/SIMS measurement are introduced focusing on its application to oxygen transport study in ceramic materials. Fast diffusion paths and preferred surface reaction sites are visualized by sector type SIMS. Oxygen vacancy diffusion coefficient and chemical diffusion coefficient of nonstoichiometric oxides are also estimated from the isotope diffusion coefficient and thermodynamic data.View full abstractDownload PDF (1311K)
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