Abstract
Characteristic secondary ion mass spectra were applied to the depth analysis of an artificial oxide of an Fe-Al alloy. Through the measurements of the variations with depth of characteristic mass spectrum which is specific to the individual matallic or oxide phase constituting the oxidized alloy, concentration profils of each phase were observed. The measured concentration profiles verified an occurrence at750°C of the following reaction. Fe2O3+2Al→α-Al2O3+2Fe
