Abstract
Quantitative analysis of constituent elements of high temperature alloys was investigated with an ion microanalyzer. Contents of constituent elements are different from one alloy to the other in high temperature alloys such as Inconel andHastelloy and there is not a common main constituent like iron in low alloy steels. For calibrating methods, total ions and nickel ions were selected as a reference. The peak intensity ratio of each element to nickel is used, as it is assured that this is proportional to the concentration ratio in alloys.
