On the Emission of Secondary Ions during Oxygen Ion Bombardment

Abstract

A simple physical model is proposed for the process of positive ion emission during oxygen ion bombardment of a solid sample. The incident ions are assumed to develop the oxygen enhanced layer at the surface of target and give rise to the emission of diatomic molecules.These clusters of atoms tend to dissociate into atoms and/or emit electrons produce atomic and molecular ions during the process of sputtering.Expressions are given for the relative intensities of ions and are compared successfully with experimental data.