超高真空質量分析計II

静作動時におけるイオンポンプ,イオンゲージの振舞い

抄録

The results of the preliminary work on the ultra-high vacuum mass spectrometer were discribed in the previous paper. After that, several reforms have been made in order to improve the end vacuum and the sensitivity of the mass spectrometer. The pressure of the order of 10^-9 mmHg was attained and the ion current of the order of 10^-18 A could be measured. Concerning with pumping action of the ion pump and the ionization gauge, variations of the residual peak heights with time were investigated in the closed vacuum system. From the results of the analyses of residual gases at the end vacuum, N2, CO, Ar, CH4, CO2, H2O and hydrocarbons(C₁-C₄ groups)were observed.