Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Significant Effects of Electrode Materials on Very Small Si-MOSFETs' Performance
Akira Toriumi
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Keywords: scaling rule, silicide, parasitic resistance, contact resistane, propagation delay time, 0.1μm complementary metal oxide-semiconductor
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1994 Volume 33 Issue 6 Pages 697-702

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