Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Elemental and Chemical Analysis of Dielectric Thin Film for Semiconductor Devices
Koji Kimoto, Takashi Aoyama
Author information
Keywords: electron energy loss spectroscopy, energy filtering transmission electron microscopy, semiconductor device, dielectric materials, elemental mapping, chemical shift
JOURNAL FREE ACCESS

2003 Volume 42 Issue 12 Pages 894

Details
Download PDF (1076K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© The Japan Institute of Metals
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Bulletin of the Japan Institute of Metals

Share this page
feedback
 Top