Materia Japan
Online ISSN : 1884-5843
Print ISSN : 1340-2625
ISSN-L : 1340-2625
Observation of Semiconductor Interfaces by a Spherical-Aberration Corrected HRTEM
Nobuo Tanaka
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Keywords: semiconductor interfaces, Cs-correction, high resolution transmission electron microscopy, SiO2/Si (100), Si/SiGe (100)
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2003 Volume 42 Issue 12 Pages 895

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