Preparation of Pyrochlore Ca₂Ti₂O₆ by Metal-Organic Chemical Vapor Deposition

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Ca-Ti-O films were prepared by metal-organic chemical vapor deposition (MOCVD) using Ca(dpm)₂ and Ti(O-i-Pr)₂(dpm)₂ precursors, and the effects of substrate temperature (T_sub) and Ca/Ti ratio (R_Ca/Ti) on the crystal structure and morphology were studied. Ca-Ti-O films consisting of pyrochlore Ca₂Ti₂O₆ and perovskite CaTiO₃ phase were obtained at T_sub=1073 K and 0.35<R_Ca/Ti<1. The content of pyrochlore Ca₂Ti₂O₆ increased with decreasing R_Ca/Ti. Pyrochlore Ca₂Ti₂O₆ almost in a single phase was obtained at R_Ca/Ti=0.46. The morphology of pyrochlore Ca₂Ti₂O₆ was agglomerated fine grains about 50 nm in diameter having a columnar texture.