抄録
SrRuO3 (SRO) thin films were prepared by laser ablation, and the effects of deposition conditions on the microstructure and electrical conductivity of these films were investigated by changing the substrate temperature (Tsub) and deposition atmosphere. The SRO thin films deposited on quartz substrates in a high vacuum (P=10−6 Pa) and an oxygen partial pressure (PO2) of 0.13 Pa were amorphous, independent of Tsub. Pseudo-cubic SRO thin films were obtained at PO2=13 Pa and Tsub>773 K. The Sr to Ru ratio increased with increasing Tsub, and free Ru was contained in SRO films prepared at P=10−6 Pa. The crystal grain coarsened with increasing Tsub and PO2. The electrical conductivity (σ) of SRO thin films increased with increasing Tsub and PO2, and the highest σ was obtained at Tsub=973 K and PO2=13 Pa. The σ of SRO films mainly changed with the Sr/Ru ratio and the surface morphology. The change of σ associated with the magnetic phase transition was observed at 163 K.
