2006 年 47 巻 7 号 p. 1620-1625
The gas flow of aerosol deposition method (ADM) is simulated using the method of computational fluid dynamics (CFD), and the velocity of particles flowing in the gas flow is also calculated by numerically integrating Newton’s second law of motion. The process gas is nitrogen and the particle material is Pb(Zr,Ti)O3 (PZT). The calculated particle velocities are compared with experimental results obtained by using a slit-cell method (SCM), which may disturb the gas-particle jet-flow of ADM during the measurement of particle velocity. The comparison of calculated and measured results reveals that the SCM can cause unexpected measurement error due to disturbing the gas-particle jet-flow caused by the stagnation pressure exceeding a certain value.
