MATERIALS TRANSACTIONS
Online ISSN : 1347-5320
Print ISSN : 1345-9678
ISSN-L : 1345-9678
Correlation between IDIG Ratio from Visible Raman Spectra and sp2/sp3 Ratio from XPS Spectra of Annealed Hydrogenated DLC Film
F. C. TaiS. C. LeeC. H. WeiS. L. Tyan
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2006 年 47 巻 7 号 p. 1847-1852

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The hydrogened diamond like carbon film (DLCH) with 1 μm thickness is made by hydrocarbon gas ion beam deposition method. The relationship between IDIG ratio fitted from visible Raman spectra and sp2/sp3 ratio done from XPS spectra of DLCH film shows a trend. The IDIG ratio of deconvoluted visible Raman spectra shows a correlation with sp2/sp3 ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The IDIG ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp2/sp3 ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400°C and without severe oxidation.

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© 2006 The Japan Institute of Metals and Materials
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