2012 年 53 巻 9 号 p. 1563-1570
Both Fe–Pt cluster/Fe–Co film and Fe–Co cluster/Fe–Pt film laminated hybrids have been prepared by combination of a plasma-gas-cluster-deposition and a helicon-plasma sputter-deposition and studied by X-ray diffraction and magnetization measurements. In Fe–Pt cluster/Fe–Co film laminated hybrids, MS increases, while HC and BHMAX monotonically decrease with the Fe–Co film thickness. In Fe–Co cluster/Fe–Pt film laminated hybrids, MS, HC and BHMAX increase with the Fe–Co cluster layer thickness in comparison with those of simple Fe–Pt films. However, the remarkable improvement of their hard magnetic properties cannot be attained in these laminated hybrids owing to both the low packing density of Fe–Co clusters and the difficulty in the diffusion-control of Fe and Co atoms from Fe–Co to Fe–Pt layers.