Abstract
The shape and crystallographic orientation of crystallites in Fe films prepared at evaporation rates, 50 nm/min, 250 nm/min and 1 μm/min, have been examined. The incidence angle and the substrate temperature are 45 and 200°C, respectively. The shape is observed by replica electron microscopy for the surface and the cross-section of the film. The crystallographic orientation is analysed by means of pole figures obtained by the Schulz method. The results obtained are summarized as follows. (i) Regardless of different evaporation rates, the columnar structure was clearly observed and the inclination angle of the column axis was about 30° off from the film normal to the vapor beam direction. (ii) The top shape of columns appearing on the film surface depends on the evaporation rate and four kinds of shapes were discriminated. The film takes a texture, which depends also on the evaporation rate. (iii) The correspondence between the top shape and the texture indicates that the top of a columnar grain is surrounded by {110} planes.
