Transactions of the Japan Institute of Metals
Online ISSN : 2432-4701
Print ISSN : 0021-4434
ISSN-L : 0021-4434
Effect of Ar Gas Pressure on Morphology and Structure of Nonequilibrium Fe–Cu Alloys Produced by rf Sputtering
Kenji SumiyamaKoichi TakemuraNoriyuki KataokaYoji Nakamura
ジャーナル フリー

1988 年 29 巻 12 号 p. 962-969


Fe1−xCux alloy films sputter-deposited on water-cooled substrates under Ar gas pressures, PAr=8.9 and 0.23 Pa, were investigated by scanning electron microscopy (SEM), transmission electron microscopy (TEM) and X-ray diffraction measurements. The SEM and TEM studies show that the alloy films made under PAr=8.9 Pa have a columnar structure with a grain size of about 20 nm, while those made under PAr=0.23 Pa have a fibrous structure with a grain size of about 10 nm. The primary solid solutions of both bcc and fcc phases are extended in the Fe-rich and Cu-rich regions, respectively in contrast to no solid solution in the equilibrium phase diagram. In the Fe1−xCux alloys made under a high PAr, moreover, the single phase regions more widely extend and the oxide phase, CuFeO2, coexists.

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